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13B-9L/8432C/8432E/8436B/18B/22B High Precision Vertical Double Sided Grinding (Polishing) Machine Series


This series of equipment is mainly used for simultaneous grinding of the upper and lower parallel end faces of thin precision parts of non-metallic and metallic hard and brittle materials such as silicon wafers, sapphire crystals, ceramic wafers, optical glass, quartz crystals, mobile phone screen glass, semiconductor materials, etc. and polished.

Category: Product Center
Keywords: Yuhuan

Typical Machined Parts

图片名称

Silicon Wafer

图片名称

Sapphire

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Mobile Phone Glass

Equipment Highlights

● This series of machine tools belong to 4 planetary annular polishing motions.

● It adopts the lifting method of the inner gear cam mechanism and is equipped with a safety self-locking cylinder device.

● The sun gear, the lower plate, the upper plate and the ring gear are driven by the gear pair + reducer transmission mode, and the speed is adjusted by frequency conversion.

● Adopt air cylinder + electric proportional valve to control loading pressure, adopt touch screen + PLC control mode.

Technical Parameter

Project

Unit

YH2M13B-9L

YH2M8432C

YH2M8432E

YH2M8436B

YH2M18B

YH2M22B

Grinding disc size

(outer diameter x inner diameter x thickness)

mm

φ978x

φ558x45

φ1070x

φ495x45

φ1070x

φ495x45

φ1140x

φ375x45

φ1280x

φ449x50

φ1462x

φ494x50

Planetary Gear Specifications

 

DP=12 Z=108

P=15.875 Z=64

P=16.842 Z=60

P=15.875 Z=84

P=21.053 Z=71

M=3 Z=184

Place the number of planetary gears

n

3≤n≤9

3≤n≤7

3≤n≤7

3≤n≤5

3≤n≤5

3≤n≤5

Maximum size of workpiece

mm

φ180

(diagonal)

φ280

(diagonal)

φ280

(diagonal)

φ360

(diagonal)

φ420

(diagonal)

φ480

(diagonal)

Minimum thickness of workpiece

mm

0.4

0.6

0.3

Abrasive flatness

mm

0.006(φ100)

 

Polished flatness

mm

0.008(φ100)

 

Abrasive surface roughness

μm

Ra0.15

0.04

Surface roughness of polished parts

μm

 

Ra0.05

 

Dimensions

(Approx: LxWxH)

mm

1650x1300 x2650

 

1510x1450 x2650

1800x1500 x2650

2200x1750 x2690

3800x3300 x3600

Overall weight (approx.)

kg

2600

3500

3200

3000

5000

11000

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